Fabrication and experimental study of Al2O3-TiC sliders with piezoelectric nanoactuators for flying height control

Journal

Microsystem Technologies

Journal Volume

13

Journal Issue

8-10

Pages

751-757

Date Issued

2007

Author(s)

Ambekar, R.P.

Bogy, D.B.

Bhatia, C. Singh

DOI

10.1007/s00542-006-0268-y

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/447596

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-34548249562&doi=10.1007%2fs00542-006-0268-y&partnerID=40&md5=dbdd1775a8b51654536fc33e06053a72

SDGs

[SDGs]SDG7

Type

conference paper