Optical-gradient type of antireflective coatings for sub-70 nm optical lithography applications

Journal

Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest

Journal Volume

2

Pages

701-

Date Issued

2003

Author(s)

Chen, H.L.

Fan, W.

Wang, T.J.

Ko, F.H.

Zhai, R.S.

Hsu, C.K.

Chuang, T.J.

DOI

10.1109/CLEOPR.2003.1277241

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/491375

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-84955284772&doi=10.1109%2fCLEOPR.2003.1277241&partnerID=40&md5=c4e97fed3fe48b7385e4affc3f70379f

Type

conference paper