A Contactless Micromachined Respiratory Sensor using Positive Temperature Coefficient Material
Journal
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Journal Volume
2019-January
Pages
87-90
Date Issued
2019
Author(s)
Abstract
In this work, we present an ultra-sensitive temperature sensor for non-contact real-time respiratory monitoring. The sensing element of the proposed device is an acrylate-based temperature sensing material with positive temperature coefficient (PTC) deposited on an interdigital electrode pair. The acrylate-based material exhibits an order-of-magnitude variation in resistivity over a temperature change of a few degrees, and was capable of detecting tiny temperature changes induced by exhalation air flow. The transient behaviors of the fabricated device were measured. Also, the effects on different room temperatures and positions of the sensor were measured and discussed. The fabricated device possesses the advantages such as low cost, energy efficient, and simple operation compared to common existing methods. © 2019 IEEE.
SDGs
Other Subjects
Energy efficiency; Mechanics; MEMS; Patient monitoring; Positive temperature coefficient; Temperature sensors; Energy efficient; Fabricated device; Interdigital electrode; Respiratory Monitoring; Respiratory sensor; Temperature changes; Temperature sensing; Transient behavior; Temperature
Type
conference paper