Direct imprinting using soft mold and gas pressure for large area and curved surfaces
Resource
Journal of Vacuum Science & Technology A 23 (6): 1687-1690
Journal
Journal of Vacuum Science & Technology
Journal Volume
Vacuum
Journal Issue
6
Pages
1687-1690
Date Issued
2005
Date
2005
Author(s)
Type
journal article
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57.pdf
Size
399.06 KB
Format
Adobe PDF
Checksum
(MD5):380448acb37d1ee3c32b3d6dc572f06f
