Direct imprinting using soft mold and gas pressure for large area and curved surfaces
Resource
Journal of Vacuum Science & Technology A 23 (6): 1687-1690
Journal
Journal of Vacuum Science & Technology
Journal Volume
Vacuum
Journal Issue
6
Pages
1687-1690
Date Issued
2005
Date
2005
Author(s)
Abstract
In this paper we report a simple and effective method that renders direct imprinting of sub-micron structures onto PMMA resist coated on large area and curved substrates using the PDMS mold on a closed chamber. Nitrogen gas was employed to generate a uniform pressure. The patterns of the soft mold could be replicated with high quality over an entire 12 in. resist-coated area. The process was further successfully applied to the imprinting of a curved substrate. © 2005 American Vacuum Society.
Type
journal article
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