Gimbal-less MEMS two-axis optical scanner array with high fill-factor
Resource
Journal of Microelectromechanical Systems 14 (6): 1323-1328
Journal
Journal of Microelectromechanical Systems
Journal Volume
14
Journal Issue
6
Pages
1323 - 1328
Date Issued
2005
Date
2005
Author(s)
Wu, M.C.
Abstract
In this paper, we report on a MEMS-based two-axis optical scanner array with a high fill factor (> 96%), large mechanical scan angles (±4.4° and ±3.4°), and high resonant frequencies (20.7 kHz). The devices are fabricated using SUMMiT-V, a five-layer surface-micromachining process. High fill factor, which is important for 1 × N2 wavelength-selective switches (WSSs), is achieved by employing crossbar torsion springs underneath the mirror, eliminating the need for gimbal structures. The proposed mirror structure can be readily extended to two-dimensional (2-D) array for adaptive optics applications. In addition to two-axis rotation, piston motion with a stroke of 0.8 μm is also achieved. © 2005 IEEE.
Subjects
Microelectromechanical devices; Micromirror array; Optical components; Optical fiber switches; Wavelength division multiplexing (WDM); Wavelength-selective switches
Other Subjects
Adaptive optics; Micromachining; Microoptics; Mirrors; Optical communication; Optical design; Optical fiber fabrication; Optical switches; Scanning; Wavelength division multiplexing; Micromirror array; Optical components; Optical fiber switches; Optical scanner array; Surface-micromachining; Wavelength-selective switches; Microelectromechanical devices
Type
journal article
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