Shearing interference microscope for step-height measurements

Journal

Journal of Microscopy

Journal Volume

266

Journal Issue

2

Pages

178-185

Date Issued

2017

Author(s)

Tr?nh, H.-X.

Lin, S.-T.

Chen, L.-C.

Yeh, S.-L.

Chen, C.-S.

Hoang, H.-H.

LIANG-CHIA CHEN

DOI

10.1111/jmi.12527

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/447821

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-85014663797&doi=10.1111%2fjmi.12527&partnerID=40&md5=e9368179e2ac916798ade340175a8395

Type

journal article