Gas pressurized hot embossing for transcription of micro-features

Journal

Microsystem Technologies

Journal Volume

10

Journal Issue

1

Pages

76-80

Date Issued

2003

Author(s)

Chang, J.-H.

Yang, S.-Y.

DOI

10.1007/s00542-003-0311-1

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/448202

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-0742268922&doi=10.1007%2fs00542-003-0311-1&partnerID=40&md5=82167f905de7a02c9957fab842c4dd96

Type

journal article