Macromodeling of Coupled-Domain MEMS Devices with Electrostatic and Electrothermal Actuations

Resource

Journal of Micromechanics and Microengineering 14: 1190-1196

Journal

Journal of Micromechanics and Microengineering

Pages

1190-1196

Date Issued

2004

Date

2004

Author(s)

Yang, Y.-J.

Cheng, S.-Y.

Shen, K.-Y.

URI

Type

journal article

File(s)

Name

10.pdf

Size

184.7 KB

Format

Adobe PDF

Checksum

(MD5):d6c2ad6c9da032660a4a0d6d5ba5127c