Development of Barbed Dry EEG Electrodes Using MEMS Technology
Date Issued
2012
Date
2012
Author(s)
Kuo, Che-Hsi
Abstract
In this work, barbed dry electrodes are designed and fabricated by MEMS technology for biopotential measurement such as EEG. Compared to the traditional wet electrodes, the dry electrodes do not need electrolytic gel to reduce the impedance between skin and electrodes, so dry electrodes are more suitable for long-term measurement. Our proposed dry electrodes consist of arrays of miniaturized spikes. These spikes are designed for penetrating human skin so that the high impedance problems associated with layers of the outer skin can be resolved. We design the electrodes 50-100μm in length to avoid the painful or uncomfortable feeling during the measurement. The fabrication of electrodes is based on wet etching, which is simple and low cost. The simulation software Etch3DTM is used to evaluate the fabrication parameters of the wet etching. The spikes are fabricated by KOH. Subsequently, the photoresist is patterned as the etching mask on the spikes, and then etched in the solution mixed with HNO3 and HF. The fabricated barbed electrodes are 81μm in length, and widest and narrowest width is 20μm and 12μm, respectively.
Subjects
EEG
barbed
dry electrode
wet etching
MEMS
Type
thesis
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