Design and Coupled Field Analysis of Two-Axis MEMS Scanners with Hidden Radial Vertical Comb-Drive Actuators
Date Issued
2007
Date
2007
Author(s)
Chiou, Sheng-Jie
DOI
zh-TW
Abstract
Abstract
We have designed a two-axis scanner with hidden radial vertical comb
drive actuator. The device is fabricated using SUMMiT-VTM micromaching
process offered by Sandia National Laboratory.It has five polysilicon structual
layers. A cross-bar spring structure consisting of lower and upper torsion
springs is designed to obtain two rotational degrees of freedom, enabling the
dual-axis rotation with cross bar spring structure.It is driven by electrostatic
force.
Mechanical maximum rotation angles of ±3.61° (45V) and ±3.01° (67V)
are achieved for rotation about the single lower and upper springs of the
cross-bar spring structure, respectively.
Use modal analysis to determine the vibration characteristics (natural
frequencies and mode shapes) of a structure or a machine component while it
is being designed.Optimize MEMS design based on modal analysis and
coupled field analysis result.
Keyword: Finite Element Method , Coupled field analysis , Modal analysis ,
two-axis scanner , MOMES
Subjects
有限元素分析
耦合場分析
模態分析
靜電致動器
光學微機電
Finite Element Method
Coupled field analysis
Modal analysis
two-axis scanner
MOMES
Type
thesis
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