Design and Fabrication of Polymer Optical Waveguide Devices
Date Issued
2004
Date
2004
Author(s)
Hsu, Chih-Wei
DOI
zh-TW
Abstract
Recently polymer optical waveguide technology has been widely developed for optical communication and interconnection. A variety of passive and active integrated-optical devices have been successfully demonstrated using polymers. However, because of the potential applications of blue lasers in storage and communication, the candidate for polymer material should be transparent not only at infrared wavelength but also at ultraviolet wavelength. In addition, polymer used as optical waveguide material should have high thermal stability. In this dissertation, benzocyclobutene (BCB) polymer waveguides are fabricated and their performance is characterized.
BCB rib waveguides were fabricated by conventional photolithography and dry etching process. Conventionally, polymer can be etched in oxygen plasma. As BCB formulations are in a class of Si-containing polymers, a mixture of oxygen and fluorine-contained gases can be used as the etchants. In this work, BCB waveguides fabricated by O2/CHF3 etching are characterized. The measured propagation losses at 1.55
Subjects
光功率分離器
積體光學
optical power splitter
polymer waveguide
integrated-optics
Type
thesis