Enhancement and Management Systems for Overall Equipment Effectiveness of Wafer Fabs
Date Issued
1999
Date
1999
Author(s)
DOI
882212E002061
Abstract
The major categories for equipment
effectiveness loss are speed loss, equipment setup,
equipment idleness, unsatisfactory product quality,
unscheduled downtime, and test wafers. The goal
of this project is to develop methodologies, tools,
and a management system for enhancing overall
equipment effectiveness of wafer fabs. Methods
for enhancing equipment effectiveness in the
areas of equipment monitoring, dynamic
preventive maintenance, job dispatching, tool
scheduling, machine assignment, tool portfolio
design, and OEE analysis and management are
investigated in this project. The preliminary
results for the first year include a factory
simulator, tool portfolio planning methods and
software, analysis and sequencing methods for
cluster tools, and equipment health indices and
prognosis models.
Subjects
Overall equipment effectiveness
factory simulation
intra-bay scheduling
tool portfolio planning
equipment health index
preventive maintenance
Publisher
臺北市：國立臺灣大學工業工程學研究所
Type
report
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Name
882212E002061.pdf
Size
60.83 KB
Format
Adobe PDF
Checksum
(MD5):68f833ec567c39467c4a357e64104b98