Robust control of a long-stroke precision stage: With applications to fresnel zone plane fabrication
Journal
2015 IEEE/SICE International Symposium on System Integration
Pages
229-234
ISBN
9.78147E+12
Date Issued
2016
Author(s)
Abstract
This paper applies a combined stage for fabricating Fresnel zone plane (FZP). The combined stage integrates piezoelectric transducers (PZT) and stepper motors, to achieve precise positioning over large strokes. Because PZT's non-linearities and system uncertainties might degrade system performance, we design robust controllers to cope with these obstacles for precision positioning. Then we integrate the stepper-motor stage for long-stroke movements. We implement the designed controllers to the combined stage, and apply it to fabricate the FZP by two photon polymerization (TPP) techniques. Last, the quality of FZP can be revealed by image tests.
Publisher
Institute of Electrical and Electronics Engineers Inc.
Type
conference paper