Development of a straightness measuring system and compensation technique using multiple corner cubes for precision stages
Journal
Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture
Journal Volume
224
Journal Issue
3
Pages
483-492
Date Issued
2010
Author(s)
Abstract
At present, the accuracy of precision manufacture is most affected by straightness errors, so the measurement and compensation of these errors are very important. In the current paper, three measurement systems for straightness are presented; they are characterized by simple set-up, online measuring, low cost, and sub-micrometre accuracy achieving 0.2μm. Experimental results show that these three measurement systems can be applied to implement a compensation system which comprises one among them, an Elmo controller, and a dSPACE controller, and accomplish static compensation and dynamic compensation in the dual linear-axis stage. The accuracies of the static and dynamic compensation achieve ±1μm and ±2.5μm, respectively. ? Authors 2010.
Subjects
Compensation systems
Compensation techniques
Corner cubes
D-space
Dynamic compensation
Low costs
Measurement system
Measuring systems
Online measuring
Precision stage
Static and dynamic
Static compensation
Straightness errors
Measurements
Online systems
Measurement errors
Type
journal article