Fabrication of concave gratings by curved surface UV-nanoimprint lithography

Journal

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Journal Volume

26

Journal Issue

5

Pages

1690-1695

Date Issued

2008-09

Author(s)

Yung-Pin Chen

Yuet-Ping Lee

Jer-Haur Chang

Lon A. Wang

DOI

URI

Type

journal article