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College of Electrical Engineering and Computer Science / 電機資訊學院
Electrical Engineering / 電機工程學系
Enhanced voltage linearity of HfO2 metal-insulator-metal capacitors by H2O prepulsing treatment on bottom electrode
Details
Enhanced voltage linearity of HfO2 metal-insulator-metal capacitors by H2O prepulsing treatment on bottom electrode
Journal
ECS Transactions
Journal Volume
33
Journal Issue
2
Pages
83-90
Date Issued
2010
Author(s)
CHEE-WEE LIU
Lin, C.-M.
Chen, Y.-T.
Lee, C.-H.
Chang, H.-C.
Chang, W.-C.
CHEE-WEE LIU
DOI
10.1149/1.3485244
URI
http://www.scopus.com/inward/record.url?eid=2-s2.0-79952564604&partnerID=MN8TOARS
http://scholars.lib.ntu.edu.tw/handle/123456789/358256
Type
conference paper
