Piezoelectric gas flow controller based on dual-bimorph actuators

Journal

Proceedings of SPIE - The International Society for Optical Engineering

Journal Volume

10595

Date Issued

2018

Author(s)

Huang, C.-Y.

Hsu, Y.-H.

DOI

10.1117/12.2296768

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/486106

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-85048056264&doi=10.1117%2f12.2296768&partnerID=40&md5=98df94986cc99492d85e21661d76521a

Type

conference paper