Sample-Efficient Regression Trees (SERT) for Semiconductor Yield Loss Analysis

Resource

IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, 23(3), 358-369

Journal

IEEE Transactions on Semiconductor Manufacturing

Pages

358-369

Date Issued

2010

Date

2010

Author(s)

Hong, Amos

DOI

URI

Type

journal article

File(s)

Name

363.pdf

Size

23.45 KB

Format

Adobe PDF

Checksum

(MD5):66ff9cbc3f776707c14c2b0ca5afb421