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College of Engineering / 工學院
Mechanical Engineering / 機械工程學系
A Monolithic Six Degrees-of-freedom Piezo-Micro-Positioner with Nanometer Resolution
Details
A Monolithic Six Degrees-of-freedom Piezo-Micro-Positioner with Nanometer Resolution
Journal
The 13th World Congress in Mechanism and Machine Science
Date Issued
2011
Author(s)
Su, C.C.
Liu, Tyng
Tsai, C.L.
Chang, S.H.
TYNG LIU
URI
https://scholars.lib.ntu.edu.tw/handle/123456789/589763
Description
Guanajuato, México
Type
conference paper