Ultra-thin Cr2O3 well-crystallized films for high transmittance APSM in ArF line

Resource

Microelectronic Engineering 67-68: 17-23

Journal

Microelectronic Engineering 67-68:

Pages

17-23

Date Issued

2003

Date

2003

Author(s)

Lai, F. D.

Huang, C. Y.

Chang, C. M.

Wang, L. A.

Cheng, W. C.

URI

Type

journal article

File(s)

Name

46.pdf

Size

179.39 KB

Format

Adobe PDF

Checksum

(MD5):cc0551d8289dbaae2620d593340f8433