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College of Electrical Engineering and Computer Science / 電機資訊學院
Electrical Engineering / 電機工程學系
A fundamental modeling approach for nano-grinding of silicon wafers
Details
A fundamental modeling approach for nano-grinding of silicon wafers
Journal
Material Science Forum
Pages
253-258
Date Issued
2005-11
Author(s)
H. T. Young
Hung-Yi Huang
YING-JAY YANG
DOI
10.4028/0-87849-990-3.253
URI
http://scholars.lib.ntu.edu.tw/handle/123456789/318178
Type
conference paper