Abbe-PCA (Abbe-Hopkins): Microlithography aerial image analytical compact kernel generation based on principle component analysis

Journal

Proceedings of SPIE - The International Society for Optical Engineering

Journal Volume

7274

Date Issued

2009

Author(s)

Tsai, M.-F.

Chang, S.-J.

Chen, C.C.P.

Melvin III, L.S.

CHUNG-PING CHEN

DOI

10.1117/12.814419

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/501078

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-65849270205&doi=10.1117%2f12.814419&partnerID=40&md5=4a63745068e013a4614122d7e2235f4f

Type

conference paper