Surface micromachined diaphragm pressure sensors with optimized piezoresistive sensing resistors

Resource

TENCON '95. 1995 IEEE Region 10 International Conference on Microelectronics and VLSI

Journal

TENCON '95

Journal Volume

VLSI

Journal Issue

10

Pages

-

Date Issued

1995-11

Date

1995-11

Author(s)

Lin, Liwei

Yun, Weijie

Chu, Huey-Chi

Chiao, Mu

DOI

DOI

N/A

URI

SDGs

[SDGs]SDG7

Type

other

File(s)

Name

00496326.pdf

Size

399.58 KB

Format

Adobe PDF

Checksum

(MD5):abb715f6f055a405d8d78e38820cc6e7