Impedance of Piezoelectric Film on Glass Substrate
Date Issued
2006
Date
2006
Author(s)
Lin, Chian-Jing
DOI
zh-TW
Abstract
The use of SAW devices has become more popular, while different types of IDT have been developed. We built a program with finite element method and boundary element method to determine the impedance of piezoelectric film on glass substrate.
FEM is one of the most popular and mature numerical methods. However, there are still some restrictions within FEM. For example, a lot of elements or special boundary conditions are needed when we analyze the problem of infinite domain. BEM suits to solve the problem of infinite domain because its fundamental solution is the Green function of infinite domain. We analyzed the semi-infinite glass substrate by BEM and the piezoelectric film by FEM. We then coupled the two methods to determine the impedance.
We built the programs for FEM and BEM individually, and confirmed the accuracy of them. Finally, we coupled the two methods to calculate the impedances and compared them with the references. The values of the impedances do not agree with the references, but the effects of changing the sizes of IDT are consistent with the references.
We manufactured IDT by MEMS technology. The results are much different from those of the programs, and the reason should be further discussed.
Subjects
阻抗
邊界元素法
有限元素法
impedance
boundary element method
finite element method
Type
thesis
File(s)![Thumbnail Image]()
Loading...
Name
ntu-95-R92522526-1.pdf
Size
23.53 KB
Format
Adobe PDF
Checksum
(MD5):4441130579d0573337b93a1ef6e80650