Characterizing Optical Constants of Thin Films for Vacuum Ultraviolet Lithography Applications

Resource

Japanese Journal of Applied Physics 43 (6B): 3684-3688

Journal

Japanese Journal of Applied Physics

Journal Issue

43

Pages

3684-3688

Date Issued

2004

Date

2004

Author(s)

Fan, Wonder

Wu, Chi-Lung

Chang-Liao, Kuei-Shu

URI

Type

journal article

File(s)

Name

11.pdf

Size

487.95 KB

Format

Adobe PDF

Checksum

(MD5):54c0059eb6ad59828907d69a25b7ac6a