Simultaneously determining Young's modulus, coefficient of thermal expansion, Poisson ratio and thickness of thin films on silicon wafer

Resource

Electronic Components and Technology Conference, 2004. Proceedings. 54th

Journal

Electronic Components and Technology Conference, 2004. Proceedings. 54th

Pages

-

Date Issued

2004-06

Date

2004-06

Author(s)

Wu, Enboa

Yang, A.J.D.

Shao, Ching-An

DOI

10.1109/ECTC.2004.1319444

DOI

N/A

URI

http://ntur.lib.ntu.edu.tw//handle/246246/200704191001151

Type

other

File(s)

Name

01319444.pdf

Size

553.62 KB

Format

Adobe PDF

Checksum

(MD5):6000b03515fcf51feac21e54d04e66d8