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College of Engineering / 工學院
Materials Science and Engineering / 材料科學與工程學系
Density and grain size of the IrOx metal nanocrystals in n-Si/SiO2/Al2O3/IrOx/Al 2O3 memory capacitors
Details
Density and grain size of the IrOx metal nanocrystals in n-Si/SiO2/Al2O3/IrOx/Al 2O3 memory capacitors
Journal
ECS Transactions
Journal Volume
33
Journal Issue
3
Pages
333-337
Date Issued
2010
Author(s)
Li, W.C.
Banerjee, W.
Maikap, S.
Yang, J.R.
JER-REN YANG
DOI
10.1149/1.3481621
URI
https://scholars.lib.ntu.edu.tw/handle/123456789/491592
URL
https://www.scopus.com/inward/record.uri?eid=2-s2.0-79952634060&doi=10.1149%2f1.3481621&partnerID=40&md5=fcb5bcda4e01c2380d05f6fe4616968e
Type
conference paper
