Density and grain size of the IrOx metal nanocrystals in n-Si/SiO2/Al2O3/IrOx/Al 2O3 memory capacitors

Journal
ECS Transactions
Journal Volume
33
Journal Issue
3
Pages
333-337
Date Issued
2010
Author(s)
Li, W.C.
Banerjee, W.
Maikap, S.
Yang, J.R.
DOI
URI
URL
Abstract
Excellent charge storage characteristics can be acquired in the novel IrOx metal nanocrystals memory devices with IrOx metal gates. The IrOx metal nanocrystals, which are small in size (diameter <4 nm) and high in density (1012/cm2), have a large memory window (>2V) at a low gate voltage of < 4V, can be used for future nanoscale NAND application.
SDGs

[SDGs]SDG7

Type
conference paper

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