High-Speed and Large-Range Scanner Integrated with Astigmatic Detection System for Atomic Force Microscopy
Journal
17th International Conference on Non-contact Atomic Force Microscopy
Date Issued
2014
Author(s)
Ren-Feng Ding
Hsuan-Fu Huang
Biing-Chwen Chang
Hsien-Shun Liao
Chih-Wen Yang
En-Te Hwu
Kuang-Yuh Huang
Chia-Seng Chang
|Ing-Shouh Hwang
Description
Tsukuba, Japan
Type
conference paper