Properties of High kappa Gate Dielectrics Gd_2O_3, Y_2O_3, and yttria stabilized ZrO2 for Si
Journal
APS Meeting Abstracts
Journal Volume
1
Pages
11007
Date Issued
2001
Author(s)
Kwo, J
Kortan, AR
Queeney, KL
Chabal Opila Jr, YJ
Muller, DA
Chu, SNG
Sapjeta, BJ
Mannaerts, JP
Boone, T
others
Type
conference paper