Adaptive Tilting Angles to Achieve High-Precision Scanning of a Dual-Probe AFM
Date Issued
2014
Date
2014
Author(s)
Lo, Yu-Ting
Abstract
With the deep development of micro- and nano- frabricated techniques, the feature size of the sample has become smaller and smaller. There is an important issue to measure this kind of small object in nano-scale. Atomic force microscopy (AFM) is a powerful measurement tool which has been wildly used in micro-fabricated structure inspection recently. However, since the fixed tilting angle of the probe employed in traditional AFM, the corner and sidewall of the scanned sample image would be distorted. To overcome the problem, in this works, an adaptive tilting angle algorithm operated on a self-designed dual-probe AFM system is presented to achieve on-line sidewall estimation for general sample profile. Through the use of adaptive tilting angle algorithm, the tilting angles of dual probes for each scan line can be determined. Above all, the probe-tilt mechanism is designed which allows the AFM system to change the tilting angles of the probe during the scanning process such that the dual-probe structure can acquire a complete high precise image in a single scan. The experimental results show outstanding performance of sidewall measurement and the high-precision image obtained by the proposed method.
Subjects
Atomic force microscopy
dual-probe scan
sidewall scan
tilting angle
adaptive algorithm
high precision scan
Type
thesis
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