Optical Characterization of Two-dimensional Photonic Crystals Based on Spectroscopic Ellipsometry with Rigorous Coupled-Wave Analysis
Journal
Microelectronic Engineering
Journal Issue
83
Pages
1798-1804
Date Issued
2006
Date
2006
Author(s)
Abstract
A simple and non-destructive optical characterizing method for the 2D photonic crystal (PC) slab was carried out by using specular spectroscopic ellipsometry. The rigorous coupled-wave analysis (RCWA) was further applied to analyze the measured ellipsometric parameters and then to simulate the structure of the measured photonic crystal. A 2D square lattice of silicon rods fabricated by electron-beam lithography on the silicon substrate was used as a testing sample in this study. The reflectance spectrum of the characterized 2D PC was also simulated by RCWA to reflect its photonic bandgap behavior directly. © 2006 Elsevier B.V. All rights reserved.
Subjects
Ellipsometry; Photonic crystal; Rigorous coupled-wave analysis
Other Subjects
Crystal lattices; Crystal structure; Electron beam lithography; Ellipsometry; Energy gap; Reflectometers; Silicon; Spectroscopic analysis; Wave effects; Photonic bandgap; Photonic crystals; Rigorous coupled wave analysis; Spectroscopic ellipsometry; Crystals
Type
journal article
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