Gas barrier properties of titanium oxynitride films deposited on polyethylene terephthalate substrates by reactive magnetron sputtering

Journal

Applied Surface Science

Journal Volume

254

Journal Issue

11

Pages

3509-3516

Date Issued

2008

Author(s)

Lin M.-C.

Chang L.-S.

Lin H.C.

DOI

10.1016/j.apsusc.2007.11.064

URI

https://www.scopus.com/inward/record.uri?eid=2-s2.0-39749103522&doi=10.1016%2fj.apsusc.2007.11.064&partnerID=40&md5=aafb4eb1743dfec25b0de46ca88e527b

https://scholars.lib.ntu.edu.tw/handle/123456789/432477

Publisher

Elsevier

Type

journal article