Material Flow Analysis of Water and Wastewater for the Semiconductor Manufacturing Industry
Date Issued
2007
Date
2007
Author(s)
Hong, Zang-Xie
DOI
zh-TW
Abstract
In recent years, owing to industrial development, the water supply inside and around Taiwan’s science parks has run short to the extent that relevant adjustments in water use have become necessary. This phenomenon is accelerated by the continued development of new science parks, particularly with high profit for parks that are home to the so-called high-tech industries. These industries are usually accompanied with environmental costs of high pollution along with high energy and water consumption. Regarding excessive water consumption required for high-tech industries, optoelectronics and semiconductor industries are the most severe. This study explores water consumption and waste water generation in semiconductor factories through material flow analysis so as to better understand the recycling condition of water supply. The analysis can provide a full-scale examination and constructive suggestions for improvement, enhancing the effective use of water supply in semiconductor factories. The present study targets a typical semiconductor factory in Hsinchu Science Park as the subject, analyzing its water consumption and waste water generation.
The results of this study show that approximately 2.8 m3 of water is consumed for every 8 inch wafer produced, and 3.0 m3 of water is needed to manufacture a 12 inch wafer. Based on the above statistical results, from the advantage point of water consumption, producing 12 inch wafers is more economical than 8 inch wafers. In addition, at present a metric ton of tap water is around 12 New Taiwan dollars (NTDs)1, and recycling a ton of chemical mechanical polishing (CMP) waste water costs roughly 110 to 135 NTDs. A wastewater plant spends 8 to 10 NTDs treating 1 ton of acid/alkali-containing waste water, and 30 to 35 NTDs dealing with 1 ton of fluorine-bearing waste water. From a purely economic perspective, the recovery of CMP waste water is not feasible. However, if environmental costs are also taken into consideration, a certain degree of recycling is necessary. In any event, stipulation of the required proportion of recycling should take into account the properties of waste water that is to be treated and the environmental conditions, e.g., water availability, of the water-consuming areas.
Subjects
半導體物質流
物質流研究
Material Flow Analysis
Type
thesis
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