Hydration effects in the photoassisted wet chemical etching of gallium nitride

Journal

IEEE Journal on Selected Topics in Quantum Electronics

Journal Volume

4

Journal Issue

3

Pages

564-569

Date Issued

1998

Author(s)

Chuang, C.-W.

Hsu, Y.-C.

Ho, J.-K.

Huang, C.-N.

Chen, C.-Y.

DOI

10.1109/2944.704119

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/499550

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-0032067970&doi=10.1109%2f2944.704119&partnerID=40&md5=b4ac79c39f38647112680108bcaa10a2

SDGs

[SDGs]SDG6

Type

journal article