Effect of Force Control Algorithms on the Scanning Probe Microscope Lithography System
Resource
Review of Scientific Instruments,76(3),036103-036103.
Journal
Review of Scientific Instruments
Journal Volume
76
Journal Issue
3
Pages
036103-036103
Date Issued
2005-03
Date
2005-03
Author(s)
Yen, J. Y.
Lin, I. M.
Lee, C. K.