In-situ volumetric topography of IC chips for defect detection using infrared confocal measurement with active structured light

Journal

Measurement Science and Technology

Journal Volume

25

Journal Issue

9

Date Issued

2014

Author(s)

Chen, L.-C.

Le, M.-T.

Phuc, D.C.

Lin, S.-T.

LIANG-CHIA CHEN

DOI

10.1088/0957-0233/25/9/094013

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/447837

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-84906259057&doi=10.1088%2f0957-0233%2f25%2f9%2f094013&partnerID=40&md5=743e519734a5f5cd647d50553ca48939

Type

journal article