Gas-assisted nanoparticle fluid magnetic imprinting technology in micro-lens manufacture and the application of projection lithography
Journal
Polymer - Plastics Technology and Engineering
Journal Volume
48
Journal Issue
5
Pages
549-553
Date Issued
2009
Author(s)
Abstract
Traditionally, making light-blocking micro-lens arrays requires not only precise positioning, but also a lot of time and cost. In this study, we try to utilize some innovative technologies. New molds are based on stainless steel plates penetrated by micro-aperture arrays. Together with gas-assisted nanoparticle fluid magnetic imprinting technology, a semi-sphere lens can be shaped by utilizing the properties of surface tension of the plastic film. It can be used to produce the plastic micro-lens array that is capable of light-blocking directly as projection lens. Using optical diffusion film, Fresnel lens, and single mask in centimeter level, we can construct a projection lithography system with micro-lens array. This brand new process technology simplifies the manufacture of micro-lens array with light-blocking capability to just one step. It cuts required time significantly and reduces the cost and pollution remarkably. Finally, we successfully generated some micrometer level pattern arrays on the photoresist layer through the exposal and developing process of this micro-lens array based projection lithography system.
Type
journal article