Application of Model Reference Adaptive Control In Active Vibration Isolation System
Date Issued
2007
Date
2007
Author(s)
Hsu, Wei-Lin
DOI
zh-TW
Abstract
In semiconductor industry the feature size in integrated circuit devices shrink continuously and the sizes are going from micrometer to nanometer. Vibration influences the precision in micro-electro-mechanical systems greatly. With the advance of technology, the requirement of vibration isolation in inspection equipment and manufacture process equipment is more and more important.
In order to solve vibration problem, anti-vibration system is widely used in industry. Passive vibration isolation is popular in industry because of its high stability and low cost, but its performance is limited. There is a tendency toward active vibration isolation(AVI) system in recent years. It achieves the result of anti-vibration by using a additional actuator. It also has good performance in low frequency region where passive vibration isolation system is poor at. But the system could be unstable due to the loading of AVI platform.
This research investigates the active vibration isolation issues and the positioning performance under variable loading. In this thesis, we design an AVI system by using laser interferometer as sensor and voice coil motor as actuator having high response velocity and linearity motion. In chapter II, we derive system dynamic equation and identify the system model.
The thesis then compares the vibration isolation performance using a classical proportional-integral-derivative (PID) controller versus using a model reference adaptive controller (MRAC). The thesis also derives adaptive law using Lyapunov stability theory. By computer simulation and experiment, these two controllers achieve the maximum attenuation of 35.89dB and 24.2dB with constant vibration frequency. Finally, we discuss the positioning performance to different platform loading. The PID controller positioning performance is easily affected upon platform loading. MRAC controller has better positioning performance in different platform loading.
Subjects
音圈馬達
主動振動抑制
PID
參考模型適應控制
voice coil motor
active vibration isolation
MRAC
Type
thesis
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