Application of opto-piezoelectric material in valveless micropump
Date Issued
2014
Date
2014
Author(s)
Chen, Yi-Chen
Abstract
In this work, we intended to change the dynamic flow rate of valveless micropump by developing a new smart composite material which is able to construct an actuator that can spatially modulated by optical means. The smart opto-piezo composite material is composed of photoconductive material TiOPc and piezoelectric material PZT. Spatial optical modulation in an opto-piezo composite mentioned above means modulating a force field of the actuator by changing the light field instead of changing the spatial distribution of the electrical field. To enhance the effect of modulating a force field by using the light field, the electrical impedance of TiOPc/copolymer thin film was measured by Agilent 4294A Precision Impedance Analyzer to investigate the impedance and electrical characteristics change before and after the external light illumination. We analyzed the relationship between the parameters of driving bias, frequency and diffuser angle so as to compare the flow rate difference of valveless micropump after illumination.
According to the experimental results of flow rate of valveless micropump, the maximum flow rate was 95.33μL/min under the condition of driving bias 100V, frequency 600Hz and diffuser angle 10°. Furthermore, the maximum flow rate of optical-modulated valveless micropump increased from 6.09μL/min to 19.62μL/min, and the ability of spatial dynamic flow rate modulation was confirmed by illuminated different area of valveless micropump. Coupling these preliminary results with some future works, return flow typically associated with the valveless micropump can potentially be further reduced in the future.
Subjects
壓電材料
感光導電材料
電阻抗
無閥式微幫浦
擴張角
Type
thesis
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