Quality Improvement for Micro Products Fabricated by Two-Photon Polymerization Technology

This thesis studies quality control and improvement of micro products fabricated by Two-Photon Polymerization (TPP). First, related theorems about Gaussian laser beam, TPP fabrication process, and basic product properties are studied. Second, the experimental equipment with laser, microscope, resin material, and piezo stage are introduced. Also, the Computer-Aided Manufacturing (CAM) system with automatic slicing, path planning, laser controlling, and stage controlling functions are introduced. Some improvements about CAM and Computer-Aided Design (CAD) system are also introduced. Third, several methods about quality control and improvement of TPP fabrication, such as the enhancement of resin stability, fabrication simulation, verification of line smoothness and surface roughness, correction of the defects of the cross line intersection points, additional stiffened ribs study, minimum TPP line width, and minimum TPP line spacing are studied. Finally, based on these improvements, several applications of TPP products, such as micro grating, micro snoopy model, and micro lens are successfully fabricated.