Optical-constant tunable (ZrO2)x/(Cr2O3)y/(Al2O3)1–x–y optical superlattices for attenuated phase shift mask in ArF lithography

Resource

Journal of Vacuum Science & Technology B 19 (6): 2617-2620

Journal

Journal of

Journal Volume

Vacuum

Journal Issue

6

Pages

2617-2620

Date Issued

2001

Date

2001

Author(s)

Lai, F. D.

Wang, L. A.

URI

http://ntur.lib.ntu.edu.tw//handle/246246/148181

Type

journal article

File(s)

Name

37.pdf

Size

74.03 KB

Format

Adobe PDF

Checksum

(MD5):3d27789678b8660ef0c894fd98c1f26a