Electromechanical coupling of CMOS-MEMS testkey for extracting material properties
Resource
The First IFToMM Asian Conference on Mechanism and Machine Science (Asian-MMS 2010), Taipei, Taiwan
Journal
The First IFToMM Asian Conference on Mechanism and Machine Science (Asian-MMS 2010), Taipei, Taiwan
Pages
-
Date Issued
2010
Date
2010
Author(s)
Chuang, W.-C.
Lee, H.-L.
Hu, Y.-C.
Shih, W.-P.
Chang, P.-Z.
Type
conference paper