Hollow stems for higher micromechanical disk resonator quality factor

Journal

IEEE International Ultrasonics Symposium, IUS

Pages

1964-1967

Date Issued

2011

Author(s)

Wu, L.

Akgul, M.

Ren, Z.

Lin, Y.

Li, W.-C.

Nguyen, C.T.-C.

DOI

10.1109/ULTSYM.2011.6293678

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/486407

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-84869066185&doi=10.1109%2fULTSYM.2011.6293678&partnerID=40&md5=b2449193ae986a921c38a72a00769505

SDGs

[SDGs]SDG7

Type

conference paper