The affinity of Si?N and Si?C bonding in amorphous silicon carbon nitride (a-SiCN) thin film

Resource

Diamond and Related Materials 14 (3-7): 1126-1130

Journal

Diamond and Related Materials

Journal Issue

14

Pages

1126-1130

Date Issued

2005

Date

2005

Author(s)

Chen, C.W.

Huang, C.C.

Lin, Y.Y.

Chen, L.C.

Chen, K.H.

URI

Type

journal article

File(s)

Name

05.pdf

Size

404.79 KB

Format

Adobe PDF

Checksum

(MD5):887f5e988103a93e13e82ee4efbdedcf