Design and Experiment of a Wavefront Analyzer Based on Right-Angle Prism Liquid-Gap Shear Plate: Improvement of SPARROW
Date Issued
2004
Date
2004
Author(s)
Huang, Kuo-Tung
DOI
zh-TW
Abstract
Minimization is an inevitable tendency due to the progress of fabrication technology nowadays. Optical measurement has been one of the most important in measurements for its non-contact and high-resolution characteristics. This dissertation discussed the theory of lateral shearing interferometry and designed a mechanism that can be used to measure highly aberration wavefront. The design concept of this mechanism is composed of one right-angle prism and one parallel shear plate. When the two components are positioned in close gap, the gap between the two components forms a shear plate structure. By modulating the gap thickness and the incline angle of the gap, the structure has the ability to measure little laser beams as well as large laser beams. When using this structure in wavefront measurement, the optical path difference of the two laser beam will change if the direction of the laser beam is not normal to the right-angle prism and induce some errors in the result. The relations of optical path differences and shear distances between different parameters will been discussed in this dissertation. By using calibration, it can be integrated to interferometer and wavefront measurement.
Subjects
剪影板
干涉
interference
shear plate
Type
thesis
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