Development of Microgripper System with Multiple Degrees of Freedom
Date Issued
2006
Date
2006
Author(s)
Liu, Kuan-Ting
DOI
en-US
Abstract
A 4-DOF microgripper is proposed to achieve micron level position capability. Each finger of the microgripper has 2 DOFs to accomplish Z and Y axes direction motion, respectively.
The static model using both Euler-Bernoulli method and Timoshenko method is derived. The maximum displacement and accessible force about y and z direction can be calculated by these methods. It is quite similar to the result of the both model. The Euler-Bernoulli method is accurate and simple enough to establish the control system.
The dynamic model based on the Euler-Bernoulli model presents a precise description of the dynamic behavior of the system. This model consists of actuator and sensor equations. Then, the state space model of the system is constructed to control the system. The controller combines the feedforward and feedback control loops. The feedforward controller compensates the hysteresis effect with the Preisach model. The strain self-sensing method was built as the sensor to measure the deflection of the microgripper without using an external sensor.
Finally, the microgripper is integrated into the three-degree-of-freedom micromanipulator to form a micromanipulation system.
Subjects
微夾爪
壓電
多自由度
microgripper
piezoelectric
Multiple DOFs
Type
thesis
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