Interfacial reactions of rf-sputtered TiNi thin films on (100) silicon with a SiN diffusion barrier

Resource

Philosophical Magazine A 84 (12): 1209-1218

Journal

Philosophical Magazine A

Journal Volume

84

Journal Issue

12

Pages

1209-1218

Date Issued

2004

Date

2004

Author(s)

Wu, S.K.

Su, J.J.

Wang, J.Y.

URI

Type

journal article

File(s)

Name

113.pdf

Size

642.43 KB

Format

Adobe PDF

Checksum

(MD5):9a0f6186747a27c38be735922de68916