To develop a high speed auto-alignment system by dual machine vision based alignment system

In this paper, 2 sub machine vision based alignment systems were used to establish a high speed alignment system for screen printing. It can be used on the solar cell and flat display panel manufacture. The 2 sub alignment system can auto align target simultaneously. When one target was takes out, another target can implement auto alignment simultaneously. It can save the wait time for target take out procedure. The sub alignment system includes 4 CCD cameras, 4 lens, 4 outer coaxial LED light sources, a vacuum table and a 3 axis motorized stage. The alignment accuracy is about 1 μm. ? 2013 SPIE.