Improved process for liquid phase deposition of silicon dioxide

Journal

Applied Physics Letters

Journal Volume

64

Journal Issue

15

Pages

1971-1973

Date Issued

1994

Author(s)

Chou, J.-S.

DOI

10.1063/1.111759

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/498748

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-36449002871&doi=10.1063%2f1.111759&partnerID=40&md5=8b96a8e4e59f1c9007aff3f7dd8de7a6

Type

journal article