Design and Development of A Positioning System Using Piezo-Buzzer Actuator and Inductance Sensor
Date Issued
2012
Date
2012
Author(s)
Chang, Han-Chih
Abstract
The aim of this thesis to develop a single axis positioning module that is applicable to build up diverse multi-axis stages for precision applications. The single axis positioning module comprises piezo buzzer actuator, inductive displacement sensor and linear guide. In order to achieve long-stroke and high resolution actuation, the actuator is driven by the piezo buzzer through the inertial driving principle. Its main influential parameters are driving voltage, frequency and load. According to the actuator construction, the solenoid is chosen to realize the inductive displacement sensor. Its design parameters are firstly derived by analyzing its inductive theory. And for realizing a precision displacement sensing, two different sensing circuits, the resonant and the differential, are developed to find out the optimal ones. Finally based on the derived characteristics of the developed actuator and the sensor, the single axis positioning control algorithm is programmed on the LabVIEW software platform, and through the parameter regulation on the man-machine interface the positioning control efficiency can be experimentally verified. The single axis positioning module has the maximum stroke of 5 mm and can bear the maximum vertical load of 15 g, and its minimum average stepping resolution is 88.4 nm. In comparison with the resonant sensing circuit, the differential sensing circuit can achieve higher repeatability and smaller hysteresis. The inductive displacement sensor can realize a measurement resolution of 2.7 um and a nonlinearity of 3.65 % for full displacement range of 5 mm. Through the close loop control, the single axis positioning module can make the positioning error smaller than 12 um.
Subjects
Single-axis
Positioning system
Inductive displacement sensor
Solenoid coil
Differential circuit
Inertial drive principle
Piezo buzzer
Type
thesis
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